Coating services

Our Coating services are based on CSEM’s broad equipment portfolio, and are compatible with up to 8” wafer surfaces and piece thicknesses of up to 5 mm on both rigid and flexible substrates.

Coating & thin-film deposition equipment includes several PVD (sputtering), CVD (thermal and plasma), ALD, and MVD tools. We offer coating-related development ranging from pure deposition services to high-potential material and process developments.

• PVD—Physical Vapor Deposition (sputtering): Horizontal and vertical PVD cluster tools with RF and DC magnetrons, including single- and multi-target chambers for rapid material screening; used for metal (Ag, Al, Mo, etc.), dielectric (TiO, SiO, MoOx, etc.), metal oxides (ZnO, ITO, etc.), and semiconductor (nitrides) deposition.
• CVD—Chemical Vapor Deposition Thermal and PECVD (plasma-enhanced CVD) cluster tools; used for a-Si, SiNx, SiC, SiOx, and a-C:H deposition.
• ALD—Atomic Layer Deposition: Thermal and plasma (ICP) assisted ALD chamber; used for dielectric, metal oxide (ZnO, AlOx, NiOx, etc.), and semiconductor deposition.
• MVD—Molecular Vapor Deposition

Our application-specific portfolio covers the following areas:

• Opto-electronics – for the development of materials and processes for inorganic and organics LEDs.
• MEMS/sensing – by developing thin-film-based sensors and MEMS
• Surface functionalization – using dedicated materials and processes for tribological improvements, coloring, and device protection.
• Aesthetics – with the development of interferential filters
• Energy – with the production of high-efficiency silicon cells and thin-film PV
• Bio-functional coatings – for the functionalization of surfaces for life sciences, bio-sensing and medical application

Micro-manufacturing & small-scale production

We provide easy access to our dedicated micro-fabrication equipment and infrastructures to provide industry with a complete product-development platform for the production of microsystems or devices in small volumes.

• Laser micro-manufacturing with short- and ultra-short pulsed laser systems for precision micromachining; processing of various materials with 2D and 2D+ (selective depth) structuring
• Silicon-based microfabrication devices or MEMS
• Printed electronics using various techniques – screen printing, single- & multi-nozzle inkjet printing, slot-die coating, blade coating – with combinatorial materials testing
• Origination & tooling of micro & nanostructures of various surfaces using various techniques including lithography, UV exposure, laser interference exposure, plasma dry etching, argon-ion beam etching, surface treatments & surface activation, and galvanics
• Replication & casting of these micro & nanostructures by evaporation PVD, UV casting replication, NIL replication, flat & roll-to-roll hot embossing, with testing and optimization of replication and casting parameters, as well as materials.

Optical simulation and modeling tools

Our comprehensive set of optical simulation tools and expertise enables us to understand and improve processes, with the goal of meeting your design and specification of your requirements. It includes:

• Ray tracing (ZEMAX)
• Rigorous coupled-wave analysis (RCWA)
• 3D modeling using RCWA + Ray Tracing
• 2D & 3D finite-difference time-domain (FDTD) and finite-element time-domain (FETD)
• Free-form optics simulation
• Diffractive optical elements (DOE) design & simulation
• Surface integral equations

Characterization & testing tools

We provide you with easy access to the instruments used for materials characterization, high-resolution 3D imaging, dimensional measurement, real-time analysis and failure-mode analysis.

• A panel of instrumentation used for materials characterization, dimensional metrology and quality control, chemical composition analysis, reliability testing, real-time analysis, failure-mode analysis, and nanoparticle characterization, etc.
• Non-destructive testing service based on phase contrast X-ray analysis for the analysis of new materials (e.g. composites), the understanding of failure mechanisms and early degradation, and the improvement of manufacturing processes. (2D and 3D classical X-ray, 2D and 3D phase – and scattering contrast with sample size up to 1000 mm, high-resolution setup down to 0.005 mm)
• Specific optical and electrical test and measuring equipment including optical coherence tomography (OCT), spectroscopy and ellipsometry, I-V curve and contact resistance measurements (solar cells), fluorescence lifetime imaging, Ulbricht sphere, light distribution & characterization, light interferences, ...

We respond to your exact needs by selecting the most appropriate solution from the available techniques.

Microsystems packaging services

We offer a one-stop-shop access to prototyping and small-series production of micro-packages, including consultancy on best materials and bonding technologies in specific application use cases.

We give you access to:

• An extended database of core properties of various adhesives
• Mastering of state-of-the-art microsystems assembly processes
• System design know how
• Hermetic packaging for harsh environments

Multiphysics FEM simulations service

Software tools such as COMSOL Multiphysics® or MapleSim® are available to model the behavior of complex systems, test concepts and optimize them based on individual or highly coupled physics (mixing structural, thermal, acoustics, fluidics, AC-DC, RF, optics, electro- and chemistry, particle tracking, etc. ).

Mixing all these physics in our models requires an understanding of complex phenomena, particularly at small scales (typically < 1cm³) where physics couple more strongly than at the macro-scale. We help build and provide “application” models tailored to your needs, allowing your engineers to access and adapt certain parameters via a simplified GUI.

We give you access to:

• Highly skilled systems and development engineers
• Advanced modeling tools and the set-up of simple to complex multiphysics models
• Tailored “FEM Applications model” directly accessible by your engineers
• Additive manufacturing (AM) shape topology optimization.

Energy systems-based services

For the development and optimization of energy systems, we propose dedicated product development that integrates the latest results of our research activities. In this context we can also provide the following specific services:

• Simulation and modeling of thermal systems (Modelica, Polysun, IDA ICE, Energy+)
• Simulation and modeling of electricity grid (PowerFactory), see also PV hosting capacity example

For the evaluation and development of electrochemical energy storage solutions, CSEM operates the Energy Storage Research Center ESReC together with the Berner Fachhochschule BFH. The following services are offered:

• Electrical and thermal characterization of cells, modules and packs
• Simulation and modelling
• SoC and SoH algorithm development
• BMS hardware and software development
• Battery storage system assessment, dimensioning and development
• Battery integration in electric vehicles and buildings
• Consulting